Charged particle beam device and method for inspecting and/or imaging a sample

ABSTRACT

A charged particle beam device for imaging and/or inspecting a sample is described. The charged particle beam device includes a beam emitter for emitting a primary charged particle beam, the charged particle beam device adapted for guiding the primary charged particle beam along an optical axis to the sample for releasing signal particles; a retarding field device for retarding the primary charged particle beam before impinging on the sample, the retarding field device including an objective lens and a proxy electrode, wherein the proxy electrode includes an opening allowing a passage of the primary charged particle beam and of the signal particles; a first detector for off-axial backscattered particles between the proxy electrode and the objective lens; and a pre-amplifier for amplifying a signal of the first detector, wherein the pre-amplifier is at least one of (i) integrated with the first detector, (ii) arranged adjacent to the first detector inside a vacuum housing of the charged particle beam device, and (iii) fixedly mounted in a vacuum chamber of the charged particle beam device. Further, a method for imaging and/or inspecting a sample with a charged particle beam device is described.

TECHNICAL FIELD

Embodiments described herein relate to devices for imaging and/orinspecting a sample with one or more charged particle beams,particularly electron beams.

Specifically, charged particle beam devices with a retarding fielddevice are described, configured to decelerate the charged particle beambefore impingement on the sample. Embodiments particularly relate to anelectron beam inspection system for inspecting a sample with3D-structures or structures with a high aspect ratio by detectingbackscattered electrons (BSEs). Embodiments further relate to a methodfor inspecting and/or imaging a sample with a charged particle beamdevice.

BACKGROUND

Charged particle beam apparatuses have many functions in a plurality ofindustrial fields including, but not limited to, critical dimensioningof semiconductor devices during manufacturing, defect review ofsemiconductor devices, inspection of semiconductor devices, exposuresystems for lithography, detecting devices and testing systems. Thus,there is a high demand for structuring, testing and inspecting specimensor samples on the micrometer and nanometer scale.

Micrometer and nanometer scale process control, inspection orstructuring is often done with charged particle beams, e.g. electronbeams, which are generated and focused in charged particle beam devices,such as electron microscopes. Charged particle beams offer superiorspatial resolution compared to, e.g., photon beams due to their shortwavelengths.

In recent years, it is becoming more and more interesting to inspectand/or image samples with 3D structures or structures having largeaspect ratios (such as large ratios of depth to opening width). Deviceslike 3D FinFETs and 3D NANDs have structures with large aspect ratioswhich are difficult to image in scanning electron microscopes (SEMs)when using secondary electrons (SEs), i.e. low energy signal electronsgenerated when the primary electron beam hits the sample surface. SEscan hardly escape from structures having high aspect ratios and canoften not be detected with a reasonable signal to noise ratio. Inparticular, critical dimension (CD) measurements of high aspect ratiotrenches and contact holes is a challenge. Image modes which usebackscattered electrons (BSEs), i.e. higher-energy electronsbackscattered from the sample, are often used for increasing the qualityof imaging and/or inspection, especially in the semiconductor industry.

In modern charged particle beam inspection systems, it would bebeneficial to detect both secondary charged particles and backscatteredcharged particles with a high detection efficiency. This would allow anaccurate inspection of both the sample surface extending essentially inan x-y-plane and of 3D-structures having a depth in the z-direction witha high resolution. In some systems, backscattered charged particleswhich leave the sample at various angles relative to the optical axisare predominantly detected with a first detector arranged close to thesample, e.g., between the objective lens and the sample. On the otherhand, secondary charged particles are predominantly detected with asecond detector arranged at a larger distance from the sample, e.g.between the beam source and the objective lens. However, obtaining ahigh BSE-detection efficiently without considerably reducing thedetection efficiency of lower-energy signal charged particles isdifficult to achieve.

In view of the above, it would be beneficial to provide a chargedparticle beam device and a method for inspecting and/or imaging a samplethat overcome at least some of the problems in the art.

SUMMARY

In light of the above, charged particle beam devices and methods forinspecting and/or imaging a sample with charged particle beam devicesaccording to the independent claims are provided. Further aspects,advantages, and features are apparent from the dependent claims, thedescription, and the accompanying drawings.

According to one aspect, a charged particle beam device for imagingand/or inspecting a sample is provided. The charged particle beam deviceincludes: a beam emitter for emitting a primary charged particle beam,the charged particle beam device adapted for guiding the primary chargedparticle beam along an optical axis to the sample for releasing signalparticles; a retarding field device for retarding the primary chargedparticle beam before impinging on the sample, the retarding field deviceincluding an objective lens and a proxy electrode, wherein the proxyelectrode includes an opening allowing a passage of the primary chargedparticle beam and of the signal particles; a first detector foroff-axial backscattered particles between the proxy electrode and theobjective lens; and a pre-amplifier for amplifying a signal of the firstdetector, wherein the pre-amplifier is at least one of (i) integratedwith the first detector, (ii) arranged adjacent to the first detectorinside a vacuum housing of the charged particle beam device, and (iii)fixedly mounted in a vacuum chamber of the charged particle beam device.

According to another aspect, a scanning electron microscope including acharged particle beam device described herein is provided. The beamemitter is an electron source configured to emit a primary electronbeam, and the scanning electron microscope further includes a samplestage for supporting the sample; and a scan deflector for scanning theprimary electron over a surface of the sample in a predeterminedscanning pattern.

According to another aspect, a method for imaging and/or inspecting asample with a charged particle beam device is provided. The methodincludes: emitting a primary charged particle beam; guiding the primarycharged particle beam along an optical axis to the sample for generatingsignal particles; focusing and retarding the primary charged particlebeam with a retarding field device that includes an objective lens and aproxy electrode arranged between the objective lens and the sample;detecting off-axial backscattered particles with a first detectorarranged between the proxy electrode and the objective lens; andpre-amplifying a signal of the first detector with a pre-amplifiermounted adjacent to the first detector in a vacuum environment insidethe charged particle beam device.

Further described is a charged particle beam device for imaging and/orinspecting a sample. The charged particle beam device includes: a beamemitter for emitting a primary charged particle beam, the chargedparticle beam device adapted for guiding the primary charged particlebeam along an optical axis to the sample for releasing signal particles;a retarding field device for retarding the primary charged particle beambefore impinging on the sample, the retarding field device including anobjective lens and a proxy electrode; and a first detector for off-axialbackscattered particles between the proxy electrode and the objectivelens. The proxy electrode has one opening allowing a passage of theprimary charged particle beam and of the signal particles, wherein theone opening is sized to allow a passage of charged particlesbackscattered from the sample at angles (a) from 0° to 20° or aboverelative to the optical axis.

Further described is a charged particle beam device for imaging and/orinspecting a sample. The charged particle beam device includes: a beamemitter for emitting a primary charged particle beam, the chargedparticle beam device adapted for guiding the primary charged particlebeam along an optical axis to the sample for releasing signal particles;a retarding field device for retarding the primary charged particle beambefore impinging on the sample, the retarding field device including anobjective lens and a proxy electrode, wherein the proxy electrodeincludes an opening allowing a passage of the primary charged particlebeam and of the signal particles; and a first detector for off-axialbackscattered particles between the proxy electrode and the objectivelens, wherein the first detector is configured to act as a furtherelectrode for influencing the primary charged particle beam and includesat least one of a conductive inner surface directed toward the opticalaxis and a conductive top surface directed toward the objective lens andconfigured to be set on a predetermined potential.

Further described is a method for imaging and/or inspecting a samplewith a charged particle beam device. The method includes: emitting aprimary charged particle beam; guiding the primary charged particle beamalong an optical axis to the sample for generating signal particles;focusing and retarding the primary charged particle beam with aretarding field device that includes an objective lens and a proxyelectrode arranged between the objective lens and the sample, whereinthe proxy electrode has one opening allowing a passage of the primarycharged particle beam and of the signal particles, wherein the oneopening is sized to allow a passage of charged particles backscatteredfrom the sample at angles (α) from 0° to 20° or above relative to theoptical axis; and detecting off-axial backscattered particles with afirst detector arranged between the proxy electrode and the objectivelens.

Embodiments are also directed at apparatuses for carrying out thedisclosed methods and include apparatus parts for performing eachdescribed method feature. The method features may be performed by way ofhardware components, a computer programmed by appropriate software, byany combination of the two or in any other manner. Furthermore,embodiments are also directed at methods of manufacturing the describedapparatuses and method of operating the described apparatuses. Itincludes method features for carrying out every function of theapparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentdisclosure can be understood in detail, a more particular description,briefly summarized above, may be had by reference to embodiments. Theaccompanying drawings relate to embodiments of the disclosure and aredescribed in the following:

FIG. 1 is a schematic view of a charged particle beam device accordingto embodiments described herein;

FIG. 2 is an enlarged view of the proxy electrode and the first detectorof the charged particle beam device of FIG. 1;

FIG. 3 shows a proxy electrode for a charged particle beam device in atop view according to embodiments described herein;

FIGS. 4a to 4b show a first detector of a charged particle beam devicedescribed herein in a perspective bottom view and in a perspective topview;

FIG. 5 is a schematic view of a charged particle beam device accordingto embodiments described herein; and

FIG. 6 shows a flow chart of a method for imaging and/or inspecting asample with a charged particle beam device according to embodimentsdescribed herein.

DETAILED DESCRIPTION OF EMBODIMENTS

Reference will now be made in detail to the various embodiments, one ormore examples of which are illustrated in the figures. Within thefollowing description, same reference numbers refer to same components.Generally, only the differences with respect to individual embodimentsare described. Each example is provided by way of explanation and is notmeant as a limitation. Further, features illustrated or described aspart of one embodiment can be used on or in conjunction with otherembodiments to yield yet a further embodiment. It is intended that thedescription includes such modifications and variations.

Without limiting the scope of protection of the present application, inthe following the charged particle beam device or components thereofwill exemplarily be referred to as an electron beam device configuredfor the detection of signal electrons. The signal electrons particularlyencompass secondary electrons and/or backscattered electrons,specifically both secondary and backscattered electrons (SEs and BSEs).However, it is to be understood that embodiments described herein can beapplied for apparatuses and components detecting other corpuscles suchas secondary and/or backscattered charged particles in the form of ionsin order to obtain a sample image or inspection result. Accordingly, inembodiments described herein, charged particles are not limited toelectrons.

A “specimen”, “sample” or “wafer” as referred to herein includes, but isnot limited to, semiconductor wafers, semiconductor workpieces, andother workpieces such as memory disks and the like. A “sample” mayspecifically be any workpiece that is structured or on which material isdeposited. A specimen, a sample or wafer may include a surface that isto be inspected and/or imaged, e.g. a surface that is structured or onwhich layers or a material pattern have been deposited. For example, asample may be a substrate or a wafer on which a plurality of electronicdevices is provided that are to be inspected. According to someembodiments, the devices and methods described herein relate to electronbeam inspection (EBI), critical dimension measurement and defect reviewapplications, where the devices and methods described herein can bebeneficially used to obtain an increased throughput and an improveddetection accuracy. According to some embodiments, an electron beaminspection (EBI), critical dimension measurement (CD) tool, and/ordefect review (DR) tool can be provided, wherein high resolution, largefield of view, and high scanning speed can be achieved.

FIG. 1 shows a schematic view of a charged particle beam device 10 forimaging and/or inspecting a sample according to embodiments describedherein. The charged particle beam device 10 includes a beam emitter 150for emitting a primary charged particle beam, particularly an electronbeam. The charged particle beam device 10 is configured to guide theprimary charged particle beam 105 along an optical axis 101 to a sample140 for releasing signal particles from the sample. The sample 140 maybe placed on a sample stage 50, the sample stage 50 including a samplesupport surface extending essentially in an x-y-plane.

The beam emitter 150 may be a cold field emitter (CFE), a Schottkyemitter, a TFE, or a high current and/or high brightness chargedparticle source, particularly an electron source. A high current isconsidered to be 5 μA in 100 mrad or above.

The charged particle beam device 10 further includes a retarding fielddevice 100 for retarding the primary charged particle beam 105 beforeimpingement on the sample 140, the retarding field device 100 includingan objective lens 110 and a proxy electrode 130. A “proxy electrode” asused herein may be understood as an electrode arranged in proximity tothe sample, specifically between the objective lens 110 and the sample140 (or the sample stage 50). In other words, the proxy electrode 130 isarranged downstream of the objective lens 110 in the propagationdirection of the primary charged particle beam 105, and is typically thelast electrode that is passed by the primary charged particle beambefore hitting the sample surface. For example, a distance D1 (see FIG.2) between the proxy electrode 130 and the sample 140 during operationmay be 5 mm or less, particularly 3 mm or less, more particularly 1 mmor less, or even 200 μm or less.

According to some embodiments described herein, the charged particlebeam device is adapted for guiding the primary beam in a column of thecharged particle beam device along the optical axis 101 to the samplefor generating signal particles released from the sample, the signalparticles including secondary particles generated upon impingement andbackscattered particles reflected from the sample. The proxy electrode130 includes one opening 131 allowing a passage of the primary chargedparticle beam 105 toward the sample and allowing a passage of the signalparticles in an opposite direction coming from the sample through theone opening 131. Typically, the one opening 131 is aligned with theoptical axis 101. Specifically, the optical axis 101 of the chargedparticle beam device may centrally intersect the one opening 131 of theproxy electrode 130.

Generally, the primary charged particle beam 105 travels through thecolumn of the charged particle beam device before hitting the sample tobe imaged and/or inspected. An interior of the column may be evacuated,i.e., the charged particle beam device typically includes a vacuumhousing 102 such that the primary charged particle beam propagatesthrough an environment having sub-atmospheric pressure, e.g. a pressureof 1 mbar or less, particularly 1×10⁻⁵ mbar or less, or even 1×10⁻⁸ mbaror less (ultra-high vacuum). The beam emitter and the objective lens maybe arranged inside the vacuum housing 102 of the charged particle beamdevice. The proxy electrode 130 may be provided adjacent to a front endof the vacuum housing 102 and/or may protrude into a sample chamberwhere the sample stage is provided. The sample chamber may be configuredfor a sub-atmospheric pressure (e.g., a high vacuum), whereas the vacuumhousing 102 of the charged particle beam device may be configured for anultra-high vacuum in some embodiments.

When the primary charged particle beam 105 impinges on the sample,different reactions occur on or in the sample. For instance, secondaryparticles are released from the sample: The primary beam impinging onthe sample dissociates other particles in the sample, in particular bythe energy provided by the particles of the primary charged particlebeam. These secondary particles, after being released from the sample,leave the sample and can be detected by a suitable detector. But theprimary charged particle beam causes a further effect: the particles ofthe primary beam bounce off from the sample (either from the surface orafter entering into the sample to a certain depth) and are reflectedfrom the sample. The particles of the primary charged particle beambouncing off the sample and leaving the sample are denoted asbackscattered particles. The backscattered particles can be detected atvarious backscattered angles for obtaining spatial information about thesample. Typically, the secondary particles and the backscatteredparticles are together referred to as signal particles or signalelectrons.

The detection of backscattered electrons is particularly beneficial forthe imaging and inspection of 3-D structures in the semiconductorindustry. For instance, devices like 3D FinFETs and 3D NANDs havestructures with large aspect ratios which are difficult to image incharged particle beam devices using the secondary particles only. Alarge aspect ratio may be understood as a ratio of the depth of thestructure in the sample to the opening width of the structure beingabout 5:1 or higher, such as 10:1 or even 20:1 or higher. In asimplified example, the structure may be a substantially cylindricalhole in the sample, providing a depth into the sample and a widthcorresponding approximately to the diameter of the substantiallycylindrical hole, as will be explained in more detail below.

Secondary particles, such as secondary electrons, cannot easily escapefrom the large aspect ratio structures and can typically not be detectedwith reasonable signal to noise ratio. In particular, CD-measurements ofhigh aspect ratio trenches and contact holes is a challenge. However, inembodiments described herein, backscattered particles can be used forimaging and/or inspecting structures with large aspect ratios.Backscattered particles can leave holes and trenches because thebackscattered particles have enough energy to escape from deepstructures, and it may not be necessary to use high extraction fieldsfor extracting backscattered particles from the sample (which isdifferent from secondary electrons). Further, under suitable (moderate)landing energies of the primary beam, the backscattered particles canpass through side walls and can leave the sample, such that a largernumber of backscattered particles can contribute to the overallbackscattered particles signal. Efficient backscattered particlesdetectors are beneficially used that can detect small-anglebackscattered particles (reflected from high aspect ratio features) aswell as large-angle backscattered particles which have passed throughsurrounding materials.

In known devices, proxy electrodes with several openings are used: Acentral opening for signal particles leaving the sample at small anglesrelative to the optical axis and at least one further opening for signalparticles (off-axial BSEs) leaving the sample at large angles relativeto the optical axis. However, a proxy electrode with a plurality ofopenings for signal particles propagating at different angles may reducethe overall detection efficiency.

In view of the above, embodiments described herein include a proxyelectrode 130 with one opening 131 that is sized to allow a passage ofcharged particles backscattered from the sample at angles α from 0° to20° or above relative to the optical axis 101. In particular, the proxyelectrode may only have one single opening instead of a plurality ofopenings. Specifically, as described herein, the following particlespropagate through the same opening of the proxy electrode: (a) theprimary charged particle beam, (b) “axial” signal particles includingsecondary particles and backscattered particles leaving the sampleessentially along the optical axis (e.g., at angles between 0° and 5°relative to the optical axis), and (c) “off-axial” signal particlesleaving the sample at larger angles relative to the optical axis (e.g.,at angles between 5° and 20°), including large-angle backscatteredelectrons propagating at angles of more than 15° relative to the opticalaxis. Accordingly, essentially no signal particles that carry valuableinformation about the sample are blocked by the body of the proxyelectrode, and both small-angle backscattered particles and large-anglebackscattered particles can be detected downstream of the proxyelectrodes in a propagation direction of the signal particles, afterhaving passed through the same opening 131 of the proxy electrode.

In some embodiments, which can be combined with other embodimentsdescribed herein, the one opening 131 of the proxy electrode 130 issized to allow a passage of charged particles backscattered from thesample at angles α from 0° to 45° or above, or even at angles from 0° to65° or above relative to the optical axis. Accordingly, also signalparticles backscattered from the sample at very large angles relative tothe optical axis can propagate through the one opening 131 of the proxyelectrode 130 without a risk of being blocked by the body of the proxyelectrode. This increases the detection efficiently of the signalparticles, particularly of off-axial backscattered particles that carryvaluable information about structures on the sample.

In some embodiments, the one opening 131 of the proxy electrode 130 is around or a circular opening that may be centrally intersected by theoptical axis 101. In some implementations, the proxy electrode isarranged very close to the sample surface during the operation of thecharged particle beam device, e.g. at a first distance D1 (see FIG. 2)of 5 mm or less, particularly 3 mm or less, more particularly 1 mm orless, or even 200 μm or less. A small first distance D1 allows alsolarge-angle backscattered electrons to propagate through the one opening131. On the other hand, the first distance D1 is typically at least 100μm, such that it is still possible to extract signal electrons from thesample by providing an extraction region between the sample and theproxy electrode. Alternatively or additionally, a diameter D4 of the oneopening 131 may be 1 mm or more, particularly 3 mm or more, or even 5 mmor more. A large diameter D4 of the one opening 131 allows alsolarge-angle backscattered electrons to propagate through the one opening131. On the other hand, the diameter D4 of the one opening may be 8 mmor less, such that a predetermined electric field can be generated inthe extraction region between the sample and the one opening 131 of theproxy electrode by applying a predetermined electric potential U_(proxy)to the proxy electrode.

The charged particle beam device further includes a first detector 120for off-axial backscattered particles, wherein the first detector 120 isarranged between the proxy electrode 130 and the objective lens 110.“Off-axial backscattered particles” are particles backscattered at anangle relative to the optical axis, e.g. at an angle of 5° or more.Accordingly, the off-axial backscattered electrons (which typically havea particle energy of several keV or several tens of keV) can be detectedby the first detector 120 at a position directly downstream of the proxyelectrode 130 in the propagation direction of the backscatteredelectrons. This increases the detection efficiency for off-axialbackscattered particles.

For example, the first detector 120 may be a backscattered electrondetector, particularly a semiconductor detector, particularly a PINdiode. In particular, the first detector 120 may be a multi-channelbackscattered electron detector including a plurality of detectionsegments whose signals can be individually processed, e.g., individuallymixed and/or combined. For example, the signals from the plurality ofdetection segments can be combined for compositional imaging and/orindividually processed for improving the topographic contrast.

Optionally, a second detector (not shown in FIG. 1) configured to detectfurther signal particles released from the sample, particularlysecondary charged particles and/or axial backscattered electrons thatare backscattered essentially along the optical axis or at small angles,may be arranged downstream of the objective lens in the travellingdirection of the signal particles. The second detector may be asecondary electron detector. Accordingly, the secondary chargedparticles and/or the axially backscattered particles propagatingessentially along the optical axis can be detected by the seconddetector at a position between the objective lens and the beam emitter.

In some embodiments, the first detector 120 may be a backscatteredelectron detector, particularly an in-lens detector with a detectionsurface 125 that may extend annularly around the optical axis 101. Insome embodiments, the first detector 120 is an in-lens detector with ahole that allows a passage of the primary charged particle beam 105 andthat has an annular detection surface surrounding the hole.

In some implementations, the detection surface 125 of the first detector120 may be sized for detecting at least charged particles backscatteredfrom the sample at angles between 15° and 30° relative to the opticalaxis, particularly at angles between 10° and 35°, more particularlybetween 7° and 40°, or an even larger range of angles. For example, asis exemplarily shown in FIG. 2, the first detector 120 may have adetection surface 125 sized for detecting charged particlesbackscattered from the sample in a range between a first angle (α1) of15° or less and a second angle (α2) of 30° or more. Axiallybackscattered particles and particles backscattered at very small anglesrelative to the optical axis (e.g., angles of 5° or less) may propagatethrough the hole of the first detector and are not detected by the firstdetector. Axially backscattered particles may optionally be detected bya second detector downstream of the objective lens in the propagationdirection of the signal particles. Charged particles backscattered atvery large angles relative to the optical axis (e.g., angles of 35° ormore, or 45° or more) may hit a support of the first detector radiallyoutside of the detection surface 125 of the first detector without beingdetected, or may already be blocked by the body of the proxy electrode130. In some embodiments, the size of the one opening 131 of the proxyelectrode 130 may be adapted to the size of the detection surface 125 ofthe first detector, such that charged particles backscattered at verylarge angles that would hit the first detector radially outside of thedetection surface are blocked by the proxy electrode.

In some embodiments, which can be combined with other embodimentsdescribed herein, the retarding field device 100 includes anelectrostatic-magnetic objective lens (or a magnetic objective lens) andthe proxy electrode 130. Generally, in a retarding field device, theelectron energy inside the column is reduced to the final landing energybefore impingement on the sample. The overall performance of theretarding field device may be determined by the immersion factor whichis the ratio of the column energy to the landing energy. The higher theimmersion factor, the better the performance is in terms of resolution.

In some embodiments, the retarding field device 100 is adapted forgenerating an extraction field for the secondary particles released fromthe sample. For instance, the retarding field device 100 acting as aretarding lens for the primary charged particle beam may act as anaccelerating lens for the secondary particles emitted by the sample. Theretarding field device may be controlled so as to adjust the operationalparameters for the purpose of decelerating the primary charged particlebeam and accelerating the secondary particles. For low landing energies,the focal power of the retarding field device is based on thecombinatory effects of the objective lens and the proxy electrode thatretard the primary electrons before impingement.

In the context of embodiments described herein, a retarding field devicefor a charged particle beam device describes a device for acting on acharged particle beam with an initially high electron energy that isdecelerated to a lower landing energy shortly before striking thesample. The ratio between the electron energy in the column afteracceleration and the landing energy before impingement on the sample canbe about 4 or more, e.g. 8 or more. The landing energy can be 10 keV orless, e.g. 5 keV or less, such as 1 keV.

According to some embodiments, the proxy electrode may be understood asthe beam influencing electrode closest to the sample or the samplestage. In an example, the distance between the proxy electrode and thesample stage or the sample is smaller than the distance between theobjective lens and the sample stage or the sample.

According to embodiments described herein, enabling a detection oflarge-angle backscattered particles with reduced detection losses isachieved by using the proxy electrode having the one opening 131 as anentrance window for the backscattered particle detection. The proxyelectrode can further be used for decelerating the primary chargedparticle beam as a final component of the retarding field device. Theproxy electrode may further be able to control the extraction fieldstrength for the secondary particles.

Since the retarding field device provides a significant potentialdifference between sample and column of the charged particle beam deviceof typically 5 keV or more, 15 keV or even 30 keV or more, e.g. about 35keV, backscattered particles passing through the one opening 131 areaccelerated before reaching the first detector 120 which is advantageousfor high efficiency detection. The first detector 120 may act as anacceleration electrode and be set on a respective potential.Accelerating the backscattered particles is in particular beneficialwhen detecting backscattered particles at a low landing energy (e.g. ofbelow 10 keV, e.g. below 3 keV or even 1 keV) or when backscatteredparticles have lost a part of their energy when travelling through thesample material. In the case that the column is on ground potential,detection with semiconductor detectors like pin diodes may bepracticable to realize because the detector as well as the detectorelectronics may be set on a ground potential.

FIG. 2 is an enlarged sectional view of the proxy electrode 130 and thefirst detector 120 of a charged particle beam device according toembodiments described herein. FIG. 3 shows the proxy electrode 130 in aschematic top view, and FIGS. 4a and 4b show the first detector 120 inschematic top and bottom views.

As is shown in FIG. 2 and FIG. 3, the proxy electrode 130 that is theelectrode closest to the sample stage has one opening 131 allowing apassage of the primary charged particle beam 105 and of the signalparticles, wherein the one opening 131 is sized to allow a passage ofcharged particles backscattered from the sample at angles from 0° to 20°or above relative to the optical axis 101. In particular, the oneopening 131 may be a round opening having a diameter D4 of 3 mm or more,particularly 4 mm or more, or even 6 mm or more. Accordingly,essentially all the signal electrons that carry valuable informationabout the sample, including off-axial backscattered electrons andsecondary electrons propagating essentially axially, may propagatethrough the same opening of the proxy electrode. The off-axialbackscattered electrons propagate toward the first detector 120 forbeing detected and/or the secondary electrons propagate toward anoptional second detector for being detected. The first detector 120 thatis configured for detecting the off-axial backscattered electrons isarranged between the proxy electrode and the objective lens.

The first detector 120 may be an in-lens detector with a detectionsurface 125 sized to detect off-axial backscattered electronsbackscattered in an angular range between a first angle (α1) of 15° (orless) and a second angle (α2) of 30° (or more), particularly in anangular range between a first angle (α1) of 10° (or less) and a secondangle (α2) of 35° (or more). The detection surface 125 may beessentially annularly shaped.

The detection surface 125 is shown in FIG. 4b in further detail. FIG. 4shows the first detector 120 in a perspective view from below, i.e. asviewed from the sample: The detection surface 125 may be annular and mayextend around a hole 123 that is provided in the first detector, e.g.centrally in the detection surface 125. The primary charged particlebeam and axial signal particles can propagate through the hole 123 inopposite directions. In some implementations, the detection surface 125may be segmented and may include a plurality of detection segments 126,particularly two or more detection segments, more particularly four ormore detection segments. At least two detection segments may be providedfor detecting signal particles in different angular ranges relative tothe optical axis, such as a first angular range from 10° to 20° and asecond angular range from 20° to 30°, wherein these values are to beunderstood as examples. Specifically, the detection segments may beprovided to cover at least two different radial ranges relative to theoptical axis 101, as is schematically depicted in FIG. 4b .Alternatively or additionally, at least two detection segments may beprovided for detecting different azimuthal ranges. For example, a firstdetection segment may have the shape of a ring section (e.g., a firstring section covering 180°), and a second detection segment may have theshape of another ring section (e.g., a second ring section covering theremaining 180°, as is schematically depicted in FIG. 4b ). More than tworing sections may be provided in some embodiments, e.g., segments fortop, bottom, left, and right, i.e. four ring sections extending over90°, respectively. Each detector segment can detect a defined portion ofthe signal particles (e.g., polar and/or azimuthal) and thus createtopographic contrast. The contrast is mainly caused by shadowing on thedeclined sides of topographic features. By providing several detectionsegments covering different azimuthal ranges, the topographic contrastcan be increased and three-dimensional features can be inspected and/orimages with an improved accuracy and/or resolution. In the embodimentshown in FIG. 4b , four detection segments are provided for covering twodifferent radial and two different azimuthal ranges.

In some embodiments, the hole 123 of the first detector 120 may have adiameter of 1.5 mm or more, particularly 2 mm or more. Alternatively oradditionally, the hole 123 may have a diameter of 10 mm or less,particularly 6 mm or less. Specifically, the hole 123 may have adiameter from 2 mm to 5 mm. A small diameter increases the detectionefficiency of backscattered charged particles by the first detector, butmay also increase the risk of instabilities, e.g. due to charging orcontamination of the first detector. A large diameter decreases thedetection efficiency for backscattered particles but reducesinstabilities, e.g. because the primary charged particle beam can beguided through the hole at a distance from the hole edge. Alternativelyor additionally, the detection surface 125 of the first detector 120 mayhave a diameter of 12 mm or more and/or 20 mm or less, particularlyabout 15 mm.

In some implementations, a second distance D2 between the proxyelectrode 130 and the first detector 120 is 3 mm or more and/or 6 mm orless, particularly 4 mm or more and/or 5 mm or less. A small seconddistance D2 increases the risk of instabilities, e.g. the risk ofarcing, but may provide a more compact retarding field device,increasing the obtainable resolution. A large second distancefacilitates the accommodation of the first detector and reduces the riskof instabilities, but may lead to a less compact device with a reducedresolution.

In some implementations, a third distance D3 between the sample and thefirst detector may be 3 mm or more and/or 12 mm or less, particularly 4mm or more and 10 mm or less. A third distance D3 in the above rangeprovides a good obtainable resolution in combination with a goodtopographic contrast.

In some embodiments, which can be combined with other embodimentsdescribed herein, the first detector 120 is configured to act as afurther electrode 122 (provided in addition to the proxy electrode 130)that is arranged between the objective lens and the proxy electrode 130and is configured for influencing the primary charged particle beamand/or the signal particles. Specifically, the first detector 120 may beconfigured to be set on a predetermined potential U_(det) in order toinfluence the primary charged particle beam propagating through the holeof the first detector 120 and/or in order to influence the signalparticles propagating through the one opening 131. The proxy electrodemay also be referred to as a “lower electrode” and the first detectormay also be referred to as an “upper electrode” herein.

In some embodiments, the further electrode 122 provided by the firstdetector 120 is configured to be set on the predetermined potentialU_(det) via a respective voltage connection. Specifically, the furtherelectrode 122 may be configured to be set on a ground potential whichmay correspond to a column potential of the charged particle beam deviceand/or which may be different from the potential U_(proxy) of the proxyelectrode and/or different from the potential U_(sample) of the sample.

Specifically, in some embodiments, the further electrode 122 and/or thecolumn may be set on a ground potential during the operation of thedevice, and the proxy electrode 130 and/or the sample 140 may be set ona high-voltage potential of, e.g. between 3 keV and 35 keV. The voltagedifference between the further electrode 122 and the proxy electrode 130may decelerate the primary charged particle beam before impingement onthe sample and/or may accelerate signal particles coming through the oneopening of the proxy electrode.

In some implementations, the first detector 120 includes a conductivesurface configured to be set on the predetermined electric potentialU_(det) For example, the first detector may include a housing or supportmade of a conductive material or may be at least partially coated with aconductive material, e.g. metallized. The conductive surface may includeat least one of a conductive inner surface 128 that is directed towardthe optical axis 101 and a conductive top surface 129 that is directedtoward the objective lens, i.e. directed in an upstream direction of theprimary charged particle beam. The conductive surface of the firstdetector may be set on a ground potential that may correspond to thecolumn potential of the charged particle beam device. Accordingly, thefirst detector 120 or at least a conductive part thereof may act as oneof the electrodes of a magnetic-electrostatic objective lens,particularly in combination with the proxy electrode 130, to deceleratethe primary charged particle beam between the first detector 120 and theproxy electrode, and/or to accelerate the signal particles between theproxy electrode and the first detector. For example, a surface, supportor housing of the first detector may be made of a conductive material ormay comprise a conductive material, e.g. via metallization, such thatthe first detector can be set on the predetermined electric potentialU_(det).

In some implementations, a potential difference may be applied betweenthe proxy electrode 130 and a column of the charged particle beamdevice, such as to decelerate the primary charged particle beam beforeimpingement on the sample. The potential difference may be 3 keV or moreand/or 50 keV or less, particularly 10 keV or more and 35 keV or less.In particular, a potential difference between the proxy electrode 130and a column of the charged particle beam device that is set on apredetermined electric potential U_(column) may be between 3 keV and 35keV (see FIG. 1).

When the first detector 120 acts as the further electrode 122, the firstdetector 120 may be set essentially on the potential of the column.Particularly, the first detector 120 may be grounded. A potentialdifference between the proxy electrode 130 and the first detector actingas the further electrode may be 3 keV or more and 35 keV or less.

By using the first detector 120 as an electrode of amagnetic-electrostatic objective lens device, another electrode can besaved and a more compact retarding field device can be provided incombination with the proxy electrode. Specifically, the objective lens110 may be a magnetic or electrostatic objective lens, and the objectivelens 110 in combination with the first detector 120 acting as an upperelectrode and the proxy electrode 130 acting as a lower electrode mayprovide a magnetic-electrostatic retarding objective lens device.Specifically, the objective lens can be arranged closer to the sample,increasing the obtainable resolution, because it may not be necessary toprovide two electrodes in addition to the first detector in a rangedownstream of the objective lens 110. Further, a defined decelerationpath for the primary charged particle beam can be provided in a rangebetween the first detector 120 and the proxy electrode 130.

It is particularly beneficial to combine the aspect of the proxyelectrode 130 with the one opening as described herein with the aspectof the first detector 120 acting as a further electrode as describedherein. Due to the high detection efficiency and the improved resolutionresulting from the compact retarding field device in which the firstdetector acts as an electrode, three-dimensional features can beinspected with a high accuracy and high contrast.

Even if the first detector 120 acting as the further electrode 122 isbeneficially used in combination with the proxy electrode 130 with theone opening 131 as described herein, the first detector 120 acting asthe further electrode 122 is also described herein as an independentaspect. Specifically, a charged particle beam device as described hereinmay include a first detector 120 for off-axial backscattered particlesarranged between a proxy electrode and an objective lens. The firstdetector is configured to act as a further electrode for influencing theprimary charged particle beam and/or the signal particles and includes aconductive surface configured to be set on a predetermined potentialU_(det). The conductive surface may include at least one of a conductiveinner surface directed toward the optical axis and a conductive topsurface directed toward the objective lens. In some embodiments, thefurther electrode 122 can be connected to a ground potential during anoperation of the device. Specifically, the further electrode 122 may beset on a predetermined electric potential corresponding to the columnpotential of the device.

In some embodiments, which can be combined with other embodimentsdescribed herein, the beam emitter 150 is adapted for emitting a primaryelectron beam, and the charged particle beam device includes electronbeam optical devices for guiding the primary electron beam along theoptical axis 101 to the sample for generating secondary electrons andbackscattered electrons. The charged particle beam device may furtherinclude a sample stage 50 for supporting the sample 140 to be inspected.

In particular, embodiments herein may relate to a scanning electronmicroscope with a charged particle beam device as described herein. Insuch a charged particle beam device, the beam emitter is an electronsource configured to emit a primary electron beam, and the scanningelectron microscope further includes a scan deflector for scanning theprimary electron over a surface of the sample in a predeterminedscanning pattern, the sample being supported on a sample stage.

According to a further aspect, which may be applied to any of theembodiments described herein and which is described herein as anindependent aspect that may be combined with other features describedherein, the charged particle beam device includes a pre-amplifier 121for amplifying a signal of the first detector 120. In someimplementations, the pre-amplifier 121 may be an electronic amplifier,particularly an operational amplifier. In some embodiments, the firstdetector 120 may be a solid-state or semiconductor detector,particularly including a PIN diode. The first detector 120 may providean electric signal that is pre-amplified by the pre-amplifier. Thepre-amplified signal may then be forwarded to a signal amplificationmodule and/or a signal evaluation module, e.g. a signal amplificationand evaluation module 160 as schematically depicted in FIG. 1. Thesignal amplification module is optional and may further amplify thepre-amplified signal before evaluation. Alternatively or additionally,the pre-amplified signal may be directly evaluated.

In some embodiments, which can be combined with other embodimentsdescribed herein, an amplifier (also referred to herein as a “mainamplifier 160”) is provided for amplifying the pre-amplified signalprovided by the pre-amplifier. The main amplifier may be arrangedoutside the vacuum housing of the charged particle beam device,particularly in an atmospheric environment. Specifically, thepre-amplifier may be arranged in a vacuum housing of the chargedparticle beam device, particularly in the column adjacent to theobjective lens and/or adjacent to the first detector, and thepre-amplified signal provided by the pre-amplifier is further amplifiedby a main amplifier arranged outside vacuum.

If the first detector 120 is a multi-channel backscattered electrondetector including a plurality of detection segments 126, thepre-amplifier 121 may be a multi-channel preamplifier and/or the mainamplifier may be a multi-channel amplifier. For example, the firstdetector 120 includes four (or more) detection segments and thepre-amplifier 121 includes a 4-channel (or >4-channel) amplifier forpre-amplifying the signals of the four detection segments.

In some embodiments, which can be combined with other embodimentsdescribed herein, the pre-amplifier 120 is at least one of integratedwith the first detector 120, arranged adjacent to the first detector 120in a vacuum housing of the charged particle beam device (e.g., insidethe vacuum housing provided by the column, e.g. mounted at the objectivelens or at a magnetic part of the objective lens), and fixedly mountedinside a vacuum housing of the charged particle beam device (e.g.,fixedly mounted inside the column, e.g. mounted at the objective lens orat a magnetic part of the objective lens). More specifically, the firstdetector 120 may be connected to the pre-amplifier 121 inside the vacuumhousing of the charged particle beam device and may be fixedly mountedat a position close to the first detector which is likewise fixedlymounted. For example, a distance between a detection surface of thefirst detector and the pre-amplifier may be 3 cm or less. In someembodiments, the first detector and the pre-amplifier may be mounted atthe objective lens, e.g. at a downstream end of the magnetic part of theobjective lens.

In some embodiments, the first detector 120 includes a support 180, e.g.a plate or housing, on which the pre-amplifier 121 is fixedly mounted.The support 180 of the first detector 180 may be arranged adjacent to adownstream end of the column of the charged particle beam device, e.g.fixed at the objective lens 110. For example, the first detector 120 andthe pre-amplifier 121 may be provided as one integrated detector moduleincluding the pre-amplifier integrated with the first detector on thecommon support 180 of the first detector 120 (as is depicted in FIG. 4a) or even on a single chip. In some embodiments, a detector moduleincluding a support supporting both the detector surface 125 and thepre-amplifier 121 at a close distance (e.g., 3 cm or less) is provided.

Arranging the pre-amplifier close to the first detector, particularlyinside the vacuum housing of the charged particle beam device (e.g.,inside the column), and/or integrating the pre-amplifier with the firstdetector to provide an integrated detector module is beneficial becausethe detection speed and the detection efficiency can be increased.Fixedly mounting the pre-amplifier at a position close to the firstdetector, e.g., on the support 180 or at the objective lens, furtherimproves the signal to noise ratio and improves the detectionefficiency. For example, increased signal intensities can be achieved bymounting the pre-amplifier at a position close to the first detector.This may enable very fast imaging speeds with high scan rates of, e.g.,50 MHz or faster, or even up to 100 MHz.

The first detector 120 may provide a high collection efficiency, e.g.,down to electron energies of 1 keV, and/or may provide a low signalcapacitance, e.g., down to 3 pF. In some embodiments, the detectormodule including the first detector and the pre-amplifier may becompact, e.g., may have a thickness of 2 mm or less, particularly 1.5 mmor less, in the direction of the optical axis.

As described herein, it is beneficial to combine the aspect of the proxyelectrode 130 having the one opening 131 and the aspect of thepre-amplifier 121 being integrally mounted with or being arrangedadjacent to the first detector 120. Combining these two aspects enablesan increased collection efficiency of off-axially backscatteredparticles, since essentially all relevant signal particles may arrive atthe first detector 121 and are directly and quickly pre-amplified,further increasing the collection efficiency and improving the signal tonoise ratio. In addition, the above two aspects are beneficiallycombined with the third aspects described herein related to the usage ofthe first detector 120 as a further (upper) electrode, provided inaddition to the proxy electrode 131 (lower electrode). Using the firstdetector 120 as a further electrode provides a more compact arrangementof components downstream of the objective lens, and hence furtherincreases the collection efficiency. Combining the above three aspectstherefore provides a charged particle beam device that enables a lownoise signal detection of off-axially backscattered particles at a broadrange of energies and combines this with imaging at high speeds.Accordingly, three-dimensional structures can be quickly and reliablyinspected with a high accuracy and good topographic contrast.

It is however to be noted that the aspect of a pre-amplifier 121 foramplifying the signal of the first detector 120, as described herein,can be applied independently of the other two aspects to a chargedparticle beam device. Accordingly, embodiments described herein alsorelate to charged particle beam devices for imaging and/or inspecting asample with the following features: a beam emitter 150 for emitting aprimary charged particle beam, the charged particle beam device adaptedfor guiding the primary charged particle beam along an optical axis tothe sample for releasing signal particles; a retarding field device 100for retarding the primary charged particle beam before impinging on thesample, the retarding field device comprising an objective lens 110 anda proxy electrode 130, wherein the proxy electrode comprises an openingallowing a passage of the primary charged particle beam and of thesignal particles; a first detector for off-axial backscattered particlesbetween the proxy electrode and the objective lens; and a pre-amplifierfor amplifying a signal of the first detector.

The pre-amplifier 121 as described herein is at least one of (α)integrated with the first detector, (b) arranged adjacent to the firstdetector in a vacuum housing of the charged particle beam device(particularly inside the column, e.g. mounted at the objective lenstogether with the first detector), and (c) fixedly mounted in the vacuumhousing of the charged particle beam device, particularly fixedlymounted together with the first detector at the objective lens orintegrated with the objective lens, e.g. with the magnetic part of theobjective lens). An integration of the pre-amplifier with the firstdetector may include a support 180 of the first detector 120 on whichthe pre-amplifier is mounted, e.g. fixedly mounted. The support 180 maybe a plate that is provided at a position downstream of the objectivelens, or the support may be mounted at a downstream end of the objectivelens. The support may carry both the detection surface 125 of the firstdetector and the pre-amplifier. An integration may alternatively includeone single chip bearing both the detection surface and thepre-amplification circuit.

In an arrangement of the pre-amplifier “adjacent to” the first detector,a distance between the detection surface and the pre-amplifier may be 5cm or less, particularly 3 cm or less. Both the pre-amplifier and thefirst detector may be provided in a vacuum housing of the chargedparticle beam device, e.g. inside the column close to a downstream endthereof.

Fixedly mounting the pre-amplifier at a position close to the firstdetector may be understood as an essentially immovable positioning ofthe pre-amplifier at a position close to the first detector and is meantto distinguish from other solutions in which a BSE detector can bepivoted or otherwise moved toward and away from a detection positionclose to the sample in a sample chamber, i.e. outside of the column.

In some embodiments, the first detector 120 is an in-lens detector witha hole allowing a passage of the primary charged particle beam and witha detection surface that at least partially surrounds the hole. Thefirst detector may include a support arranged between the objective lensand the proxy electrode or mounted at the objective lens or integratedtherewith, wherein the preamplifier may be mounted on the support,particularly fixedly mounted on the support. More specifically, thefirst detector may include a semiconductor detector with a detectionsurface, and the pre-amplifier may be arranged inside the vacuum housingof the charged particle beam device at a distance of 3 cm or less fromthe detection surface. The first detector may include a plurality ofdetector segments, and the pre-amplifier may be a multi-channelpre-amplifier. Each detector segment may be associated to a respectiveamplification channel, such that the signals of the detector segmentscan be individually amplified before evaluation.

As explained above, integrating the pre-amplifier with the firstdetector and/or fixedly mounting the pre-amplifier at a support of thefirst detector adjacent to the first detector considerably improves thecollection efficiency and the detection speed.

FIG. 5 shows a charged particle beam device 10, such as an SEM imagingapparatus, i.e. a wafer imaging system. The column 20 of the chargedparticle beam device may provide a first chamber 21, a second chamber 22and a third chamber 23. The first chamber, which can also be referred toas a gun chamber, includes the beam emitter 150 having a particleemitter 31 and a suppressor 32. The retarding field device 110 may beaccommodated in the third chamber, and the proxy electrode 130 may beprovided at a front end of the column 20.

According to some embodiments described herein, the particle emitter 31is connected to a power supply 331 for providing a voltage to theparticle emitter. In some examples described herein, the potentialprovided to the particle emitter is such that the charged particle beamis accelerated to an energy of 20 keV or above. Accordingly, typicallythe particle emitter is biased to a potential of −20 keV or highernegative voltages. As described above, having the particle emitter 31 ona negative potential is a typical embodiment with the benefits that thecolumn and the beam guiding tube can be at ground or at a moderatepotential.

The primary charged particle beam is generated by the beam emitter 150,e.g. a primary electron beam. In the example of FIG. 5, the beam isaligned to the beam limiting aperture 450, which is dimensioned to shapethe beam, i.e. blocks a portion of the beam. The beam may then passthrough the beam separator 380, which separates the primary electronbeam from the secondary electrons (and, as the case may be, the axialbackscattered electrons). The primary electron beam is focused on thesample 140 by the objective lens. The sample may be positioned on asample stage 50. On impingement of the primary electron beam, forexample, secondary or backscattered electrons are released from thesample 140. A second detector 398 may detect the secondary electronsand/or axially backscattered electrons and may be denoted as a seconddetector herein.

According to some embodiments, which can be combined with otherembodiments described herein, a condenser lens system 420 and a beamshaping or beam limiting aperture 450 are provided. A two-stagedeflection system 440 may be provided between the condenser lens system420 and the beam limiting aperture 450 for alignment of the beam to theaperture.

As is shown in FIG. 5, the objective lens has a magnetic lens componenthaving pole pieces 64/63 and a coil 62, which focuses the primaryelectron beam on the sample 140. The objective lens shown in FIG. 5includes the upper pole piece 63, the lower pole piece 64 and the coil62 forming a magnetic lens component of the objective lens. One or moreelectrodes may be provided for forming an electrostatic lens componentof the objective lens. According to some embodiments described herein,the magnetic lens component and the electrostatic lens componentsubstantially overlap with each other to form a compound lens, alsoreferred to herein as a “retarding field device” that also includes theproxy electrode 130 arranged close to the sample.

Further, a scanning deflector assembly 370 may be provided. The scanningdeflector assembly 370 can be a magnetic or an electrostatic scanningdeflector assembly, which is configured for high pixel rates. Accordingto typical embodiments, which can be combined with other embodimentsdescribed herein, the scanning deflector assembly 370 can be a singlestage assembly as shown in FIG. 5. Alternatively, a two-stage or even athree-stage deflector assembly can be provided. Each stage may beprovided at a different position along the optical axis 101.

According to some embodiments, secondary and/or axially backscatteredelectrons are extracted from the sample and are accelerated by theretarding field device. The beam separator 380 separates the primaryelectron beam from the signal electrons. The beam separator can be aWien filter and/or can be at least one magnetic deflector, such that thesignal electrons are deflected away from the optical axis 101. Thesignal electrons may then be guided by a beam bender 392, e.g. ahemispherical beam bender, and a lens system 394 to the second detector398. Further elements like a filter 396 can be provided. According tosome embodiments, the second detector 398 can be a segmented detectorconfigured for detecting signal electrons depending on the startingangle at the sample.

According to embodiments described herein, the proxy electrode 130 isprovided at a position close to the sample, the proxy electrode beingconfigured in accordance with any of the embodiments described herein,such that reference can be made to the above explanations, which are notrepeated here.

The charged particle beam device shown in FIG. 5 further includes thefirst detector 120 for detecting off-axially backscattered particles(e.g. electrons) having passed through the one opening of the proxyelectrode 130. The first detector 120 (e.g. a scintillator, pin diode,or other electron sensitive device) may have different shapes accordingto the intended applications. For instance, if only a totalbackscattered particle signal is of interest, a ring detector may beprovided. According to some embodiments, for topography contrastdetection, a 4-quadrant detector may be a possible choice. In someembodiments, different ring zones (which might be additionallysegmented) may be used to detect specific parts of the angularbackscattered particle distribution (such as angular and polarsegmentation). By detecting specific parts of the angular distributionof the backscattered particles, depth information can be gathered.Gathering depth information enables the gathering of 3-D information ofthe composition of the sample (in particular structures with a highaspect ratio). By combining the detection of the angular distribution ofthe backscattered particles with varying landing energies of the primarycharged particle beam, a sample tomography can be achieved.

According to some embodiments, a tunable energy supply for the primarycharged beam may be provided. Generally, the energy of the primarycharged particle beam is chosen high enough so that backscatteredparticles from an interesting depth can penetrate the surroundings (suchas walls of a structure of the sample). On the other hand, the energy ofthe primary charged particle beam is chosen so as not to be too high toavoid penetration into the deeper sample layers and reduce signal tonoise ratio by unwanted depth information.

The potentials of the emitter, the column and the electrodes can beprovided in the system according to any of the embodiments describedherein. As a typical example, the beam guiding tube (also referred to asthe “column” herein) may be on ground potential. Accordingly, theelectrons travel through the column, which is on ground potential. Thehousing of the column can be provided on ground potential. The housingbeing on ground potential is indicated by reference numerals 3 in FIG.5.

FIG. 6 shows a flow chart of a method of inspecting and/or imaging asample with a charged particle beam according to embodiments describedherein. The sample is inspected and/or imaged by a charged particle beambeing provided by a charged particle beam device having a column, anoptical axis, and a sample stage for supporting a sample during imagingand/or inspection as described herein.

The method includes, in box 510, emitting a primary charged particlebeam. The beam may be emitted by a beam emitter, particularly by anelectron source. The method includes, in box 520, guiding the primarycharged particle beam in the column of the charged particle beam devicealong an optical axis to the sample for generating signal particles,particularly including backscattered and secondary particles. Opticalelements may be provided for guiding and/or shaping the primary chargedparticle beam from the beam emitter to the sample. FIG. 5 shows examplesof optical elements, such as a condenser lens system, an aperture, abeam separator, and the like. The skilled person will understand thatthe charged particle beam device may include additional or alternativeoptical elements, e.g. depending on the planned applications oroperations modes, the sample, the structures to be inspected and/orimaged, the energy used for the primary charged particle beam and thelike.

The method further includes, in box 530, focusing and retarding theprimary charged particle beam with a retarding field device including anobjective lens and a proxy electrode arranged between the objective lensand the sample, wherein the proxy electrode may include one openingallowing a passage of the primary charged particle beam and of thesignal particles.

Retarding the primary charged particle beam may be performed in an abovementioned range, such as retarding the primary beam to a landing energyon the sample of about 10 keV or less, e.g. 5 keV or less, such as 1keV. Typically, the retarding field device includes amagnetic-electrostatic objective lens and a proxy electrode between themagnetic-electrostatic objective lens and the sample stage. The primarycharged particle beam passes through the one opening of the proxyelectrode. The one opening of the proxy electrode is sized to allow apassage of charged particles backscattered from the sample at anglesfrom 0° to 20° or above relative to the optical axis.

The primary charged particle beam—after having passed the one opening ofthe proxy electrode—impinges on the sample and causes signal particles(such as secondary particles and backscattered particles) to leave thesample, in particular in the direction away from the sample. Thebackscattered particles may include axially and small-anglebackscattered particles and large-angle backscattered particles. Boththe axially backscattered particles and off-axially backscatteredparticles may propagate through the one opening of the proxy electrodeallowing a passage of backscattered particles from 0° to 20° or aboverelative to the optical axis.

The method further includes, in box 540, detecting off-axialbackscattered particles with the first detector that is arranged betweenthe proxy electrode and the objective lens. Optionally, secondaryparticles released from the sample and propagating through the hole ofthe first detector may be detected by a second detector. For instance,the second detector may be arranged after the objective lens in atravelling direction of the secondary particles. According to someembodiments, the first detector and/or the second detector may bedetectors as described in detail above.

In implementations, the signal of the first detector may bepre-amplified with a pre-amplifier mounted adjacent to the firstdetector in a vacuum environment of the charged particle beam device,particularly in the vacuum housing that is provided by the column. Thepre-amplifier may be at least one or more of (i) integrated with thefirst detector, e.g. by being provided on a common support with thefirst detector, (ii) arranged at a distance of 3 cm or less from adetection surface of the first detector inside the vacuum housing of thecharged particle beam device, and (iii) fixedly mounted in the vacuumhousing of the charged particle beam device. In some implementations,the first detector includes a support, e.g. a plate, extending betweenthe objective lens and the sample and/or mounted at the objective lens,and the pre-amplifier is mounted on the support.

In some embodiments, a potential difference between the proxy electrodeand the column of the charged particle beam device may be between 3 keVand 35 keV for decelerating the primary charged particle beam beforeimpingement on the sample. In particular, the first detector may act asa further electrode that is set essentially on the potential of thecolumn. In particular, both the column and the first detector may beessentially grounded. In some implementations, a potential differencebetween the proxy electrode and the further electrode may be between 3keV and 35 keV.

In some embodiments, which can be combined with other embodimentsdescribed herein, a signal of the first detector may be amplified with apre-amplifier that is mounted adjacent to the first detector in a vacuumenvironment in the charged particle beam device, particularly inside thecolumn of the charged particle beam device. The pre-amplified signal ofthe first detector may then be guided to a signal amplification andevaluation module that may be arranged outside of the vacuum housing ofthe charged particle beam device. The signal amplification andevaluation module may evaluate the pre-amplified signal to obtainspatial information about the sample, particularly for inspecting and/orimaging the sample.

In some embodiments, at least one or more of the following distances areprovided during the sample inspection: A first distance D1 between thesample and the proxy electrode may be 200 μm or more and 3 mm or less. Asecond distance D2 between the proxy electrode and the first detectormay be 3 mm or more and 6 mm or less, particularly 4 mm or more and 5 mmor less. A third distance D3 between the sample and the first detectormay 3 mm or more and 10 mm or less, particularly 4 mm or more and 9 mmor less.

While the foregoing is directed to embodiments, other and furtherembodiments may be devised without departing from the basic scope, andthe scope thereof is determined by the claims that follow.

The invention claimed is:
 1. A charged particle beam device for imagingand/or inspecting a sample, comprising: a beam emitter for emitting aprimary charged particle beam, the charged particle beam device adaptedfor guiding the primary charged particle beam along an optical axis tothe sample for releasing signal particles; a retarding field device forretarding the primary charged particle beam before impinging on thesample, the retarding field device comprising an objective lens and aproxy electrode, wherein the proxy electrode comprises an openingallowing a passage of the primary charged particle beam and of thesignal particles; a first detector for off-axial backscatteredparticles, the first detector arranged between the proxy electrode andthe objective lens and configured to act as a further electrode forinfluencing at least one of the primary charged particle beam or thesignal particles; and a pre-amplifier for amplifying a signal of thefirst detector, wherein the pre-amplifier is at least one of: (i)integrated with the first detector, (ii) arranged adjacent to the firstdetector inside a vacuum housing of the charged particle beam device,and (iii) fixedly mounted in a vacuum housing of the charged particlebeam device.
 2. The charged particle beam device according to claim 1,wherein the first detector is an in-lens detector with a hole allowing apassage of the primary charged particle beam and with a detectionsurface at least partially surrounding the hole.
 3. The charged particlebeam device according to claim 1, wherein the first detector comprises asupport arranged between the objective lens and the proxy electrode ormounted at the objective lens, and the pre-amplifier is mounted on thesupport.
 4. The charged particle beam device according to claim 1,wherein the first detector comprises a semiconductor detector with adetection surface, and the pre-amplifier is arranged inside the vacuumhousing of the charged particle beam device at a distance of 3 cm orless from the detection surface.
 5. The charged particle beam deviceaccording to claim 1, further comprising an amplifier for amplifying thepre-amplified signal provided by the pre-amplifier, the amplifierarranged outside the vacuum housing of the charged particle beam device.6. The charged particle beam device according to claim 1, wherein thefirst detector includes a plurality of detector segments and thepre-amplifier is a multi-channel pre-amplifier.
 7. The charged particlebeam device according to claim 1, wherein the first detector comprises aconductive surface configured to be set on a predetermined potential. 8.The charged particle beam device according to claim 1, wherein thefurther electrode provided by the first detector is configured to be seton a ground potential.
 9. The charged particle beam device according toclaim 1, further comprising a second detector for secondary chargedparticles released from the sample, the second detector provideddownstream of the objective lens in a travelling direction of thesecondary charged particles.
 10. A scanning electron microscopeincluding the charged particle beam device according to claim 1, whereinthe beam emitter is an electron source configured to emit a primaryelectron beam, the scanning electron microscope further comprising: asample stage for supporting the sample; a scan deflector for scanningthe primary electron over a surface of the sample in a predeterminedscanning pattern.
 11. A charged particle beam device for imaging and/orinspecting a sample, comprising: a beam emitter for emitting a primarycharged particle beam, the charged particle beam device adapted forguiding the primary charged particle beam along an optical axis to thesample for releasing signal particles; a retarding field device forretarding the primary charged particle beam before impinging on thesample, the retarding field device comprising an objective lens and aproxy electrode, wherein the proxy electrode comprises an openingallowing a passage of the primary charged particle beam and of thesignal particles; a first detector for off-axial backscatteredparticles, the first detector arranged between the proxy electrode andthe objective lens, wherein the first detector has an annular detectionsurface sized at least for detecting charged particles backscatteredfrom the sample at angles between 15 degrees and 30 degrees relative tothe optical axis; and a pre-amplifier for amplifying a signal of thefirst detector, wherein the pre-amplifier is at least one of: (i)integrated with the first detector, (ii) arranged adjacent to the firstdetector inside a vacuum housing of the charged particle beam device,and (iii) fixedly mounted in a vacuum housing of the charged particlebeam device.
 12. The charged particle beam device according to claim 11,wherein the annular detection surface is segmented and includes at leastfour detection segments.
 13. A charged particle beam device for imagingand/or inspecting a sample, comprising: a beam emitter for emitting aprimary charged particle beam, the charged particle beam device adaptedfor guiding the primary charged particle beam along an optical axis tothe sample for releasing signal particles; a retarding field device forretarding the primary charged particle beam before impinging on thesample, the retarding field device comprising an objective lens and aproxy electrode, wherein the proxy electrode comprises an openingallowing a passage of the primary charged particle beam and of thesignal particles; wherein the one opening is sized to allow a passage ofthe primary charged particle beam and of the signal particles, whereinthe one opening is sized to allow a passage of charged particlesbackscattered from the sample at angles from zero degrees to twentydegrees or above relative to the optical axis; a first detector foroff-axial backscattered particles, the first detector arranged betweenthe proxy electrode and the objective lens; and a pre-amplifier foramplifying a signal of the first detector, wherein the pre-amplifier isat least one of: (i) integrated with the first detector, (ii) arrangedadjacent to the first detector inside a vacuum housing of the chargedparticle beam device, and (iii) fixedly mounted in a vacuum housing ofthe charged particle beam device.
 14. The charged particle beam deviceaccording to claim 13, wherein the one opening is sized to allow apassage of charged particles backscattered from the sample at anglesfrom 0° to 45° or above relative to the optical axis.
 15. The chargedparticle beam device according to claim 13, wherein the one opening is around or circular opening that is centrally intersected by the opticalaxis and has an opening diameter of 2 mm or more and 6 mm or less.
 16. Amethod for imaging and/or inspecting a sample with a charged particlebeam device, comprising: emitting a primary charged particle beam;guiding the primary charged particle beam along an optical axis to thesample for generating signal particles; focusing and retarding theprimary charged particle beam with a retarding field device comprisingan objective lens and a proxy electrode arranged between the objectivelens and the sample; detecting off-axial backscattered particles with afirst detector arranged between the proxy electrode and the objectivelens, wherein the first detector acts as a further electrode that is setessentially on a potential of a column of the charged particle beamdevice; and pre-amplifying a signal of the first detector with apre-amplifier mounted adjacent to the first detector in a vacuumenvironment.
 17. The method of claim 16, wherein the first detectorincludes a support arranged between the objective lens and the sample ormounted at the objective lens, and the pre-amplifier is mounted on thesupport.
 18. The method of claim 16, wherein the proxy electrodecomprises one opening allowing a passage of the primary charged particlebeam and of the signal particles, wherein the one opening is sized toallow a passage of charged particles backscattered from the sample atangles from 0° to 20° or above relative to the optical axis.
 19. Themethod according to claim 16, wherein a potential difference between theproxy electrode and the further electrode is between 3 keV and 35 keV.